Shown in these photos is the ST LYPR540AH Tri-axis MEMS gyroscope, shot by a scanning electron microscope (SEM).

MEMS devices require extremely complicated and sensitive manufacturing procedures to produce the kind of accuracy needed for reliable sensors.

Most MEMS devices require a combination of deposition of a film layer, patterning to mask off areas of the deposited film to remain after etching, and etching to remove excess film to achieve the final product.