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crwdns2933797:0Miroslav Djuriccrwdnd2933797:0crwdne2933797:0
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| + | [* black] When looking at the MEMS die, you get a feeling of how they function. The microphone itself has a quite simple design, comprising two parallel polysilicon plates separated by a small air gap. The upper plate (poly 2) is perforated with an array of small holes (which are needed for the MEMS release etch). A solid poly 1 plate forms the bottom capacitor plate |
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