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[* icon_note] The chips in the steps below are not part of the iPhone 4, but are included to illustrate the incredible structures of MEMS gyroscopes. | |
[* black] Shown in these photos is the ST LYPR540AH Tri-axis MEMS gyroscope, shot by a scanning electron microscope ([link|http://en.wikipedia.org/wiki/Scanning_electron_microscope|SEM]). | |
[* black] MEMS devices require extremely complicated and sensitive [link|http://en.wikipedia.org/wiki/Microelectromechanical_systems#MEMS_manufacturing_technologies|manufacturing procedures] to produce the kind of accuracy needed for reliable sensors. | |
- | [* black] Most MEMS devices require a combination of deposition of a film layer, patterning to mask off areas of the deposited film to remain after etching, and etching to remove excess |
+ | [* black] Most MEMS devices require a combination of deposition of a film layer, patterning to mask off areas of the deposited film to remain after etching, and etching to remove excess film to achieve the final product. |