Chances are slim if they went through the wash, but I would take them out of the case (assuming it's a charging case) and leave them for at least a few days somewhere warm (not hot) with some airflow for a few days (or longer).[br]
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Under normal circumstances, I would say to tear them apart and disconnect the battery, but these aren't really built to be taken apart. The case, to an extent, but not the earbuds themselves. So, letting them dry out is probably the best you can do.