Hi,
Don't know the machine but if you keep getting the same error code I would follow that until you prove it isn't the problem.
At least check the wiring from the sub pcb (connector P52) to the mems sensor at both ends. See p.19 of the service manual you linked.
As you say an mems error is the vibration or out of balance sensor.
If the sensor indicates that it thinks that the machine is out of balance I don't think that it will continue with the cycle. As to why is loops between fill and drain idk